干式罗茨真空泵内气体流动的CFD 模拟

岳向吉¹ 巴德纯^1* 刘 坤¹ 王光玉² 张振厚² 陈 超¹

(1.东北大学机械工程与自动化学院 沈阳 110819；2.中国科学院沈阳科学仪器研制中心 沈阳 110168)

　　Abstract:As one key equipment, dry vacuum pump is widely used in IC industry and process industry. Due to the harsh operational conditions, complicated inner flow and thermodynamics mechanism, the design theory and product development are getting more and more attention. In this paper, based on dynamics mesh method, the 3-D transient numerical model for multi-stage dry Roots-type vacuum pump was set up, the performance parameters of vacuum pump was calculated, the flow process, phenomena, and main characteristics of flow field inside the pump were analyzed. This work provides an approach and reference for the study and analysis on design problems for multi-stage dry vacuum pump.

　　Keywords Dry Roots-type vacuum pump,Computational fluid dynamics,Dynamics mesh,Numerical simulation

　　摘要：干式真空泵作为核心装备广泛应用于IC 产业和流程工业。由于运行条件苛刻，内部流动和热力学机制复杂，其设计理论和产品研发越来越受到重视。

　　本文基于动网格方法建立了多级干式罗茨真空泵的三维瞬态数值模型，计算了真空泵的性能参数，分析了泵内的流动过程、现象和流场的主要特征。为研究和分析多级干式真空泵的设计问题提供了手段和参考。

　　关键词：干式罗茨真空泵 计算流体力学(CFD) 动网格 数值模拟